TRIS(DIMETHYLAMINO)SILANE
- Product Name
- TRIS(DIMETHYLAMINO)SILANE
- CAS No.
- 15112-89-7
- Chemical Name
- TRIS(DIMETHYLAMINO)SILANE
- Synonyms
- TDMAS;3DMAS;DK087;LS 1460;amino)siL;(Me2N)3SiH;3DMAS : [(CH3)2N]3SiH;Tris(dimethyamino)silane;Tri(dimethylamino)silane;TRIS(DIMETHYLAMINO)SILANE
- CBNumber
- CB1241150
- Molecular Formula
- C6H19N3Si
- Formula Weight
- 161.32
- MOL File
- 15112-89-7.mol
TRIS(DIMETHYLAMINO)SILANE Property
- Melting point:
- <0°C
- Boiling point:
- 145 °C
- Density
- 0,838 g/cm3
- refractive index
- 1.4247
- Flash point:
- 25°C
- pka
- 10.93±0.70(Predicted)
- form
- liquid
- color
- colorless to light yellow
- Specific Gravity
- 0.84
- Sensitive
- air sensitive, moisture sensitive
- Hydrolytic Sensitivity
- 8: reacts rapidly with moisture, water, protic solvents
- EPA Substance Registry System
- N,N,N',N',N'',N''-Hexamethylsilanetriamine (15112-89-7)
Safety
- Hazard Codes
- F,C
- Risk Statements
- 10-36/37/38-52/53-34-29-20-15-11
- Safety Statements
- 16-26-36/37/39-45-43
- RIDADR
- 1993
- WGK Germany
- 3
- RTECS
- VV5800000
- TSCA
- Yes
- Toxicity
- rabbit,LD50,skin,477mg/kg (477mg/kg),LIVER: OTHER CHANGESLUNGS, THORAX, OR RESPIRATION: CHRONIC PULMONARY EDEMA,Toxicology and Industrial Health. Vol. 5, Pg. 45, 1989.
Hazard and Precautionary Statements (GHS)
- Symbol(GHS)
-
- Signal word
- Danger
- Hazard statements
-
H225Highly Flammable liquid and vapour
H261In contact with water releases flammable gas
H302Harmful if swallowed
H311Toxic in contact with skin
H314Causes severe skin burns and eye damage
H330Fatal if inhaled
- Precautionary statements
-
P210Keep away from heat/sparks/open flames/hot surfaces. — No smoking.
P231+P232Handle under inert gas. Protect from moisture.
P280Wear protective gloves/protective clothing/eye protection/face protection.
P303+P361+P353IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower.
P305+P351+P338IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing.
N-Bromosuccinimide Price
- Product number
- 759562
- Product name
- Tris(dimethylamino)silane
- Purity
- packaged for use in deposition systems
- Packaging
- 25g
- Price
- $980
- Updated
- 2024/03/01
- Product number
- 570133
- Product name
- Tris(dimethylamino)silane
- Purity
- electronic grade, 99.999%
- Packaging
- 25g
- Price
- $214
- Updated
- 2024/03/01
- Product number
- 14-8750
- Product name
- Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM
- Packaging
- 5g
- Price
- $75
- Updated
- 2024/03/01
- Product number
- 14-8750
- Product name
- Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM
- Packaging
- 25g
- Price
- $214
- Updated
- 2024/03/01
- Product number
- 98-4035
- Product name
- Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM, 14-8750, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD
- Packaging
- 25g
- Price
- $1211
- Updated
- 2024/03/01
TRIS(DIMETHYLAMINO)SILANE Chemical Properties,Usage,Production
Uses
Tris(dimethylamino)silane (TDMAS) is used as an organosilicon source for the deposition of Si oxynitride; carbonitride; nitride and oxide thin films. It is also used to form multicomponent silicon containing thin films. The depositions can be carried out at low substrate temperatures (<150). The melting point and vapor pressure of TDMAS is in a suitable working range; thus making it a very good vapor deposition precursor.
General Description
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TRIS(DIMETHYLAMINO)SILANE Preparation Products And Raw materials
Raw materials
Preparation Products
TRIS(DIMETHYLAMINO)SILANE Suppliers
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- Product
- tris(dimethylamino)silane 15112-89-7
- Price
- US $1.00/KG
- Min. Order
- 1KG
- Purity
- Min98% HPLC
- Supply Ability
- g/kg/ton
- Release date
- 2019-12-23